제품소개 Product

Motorized Positioners & Controllers
8MTL300 - Direct Drive Linear Translation Stage
  • 8MTL300 - Direct Drive Linear Translation Stage
제조사 STANDA Ltd
8MTL300 - Direct Drive Linear Translation Stage

Direct Drive Linear Translation Stage

Direct Drive Linear Translation Stage of series 8MTL300 are based on 3 phase ironless linear brushless servo motor technology. Direct drive technology allow user to reach zero backlash motion with high accuracy, repeatability, motion stability and low friction. In order to proof precision of stage and imitate working condition, Standa provides measurement reports in both: disassembled and assembled conditions (if required with load of customer).

Linear non-contact optical encoder as a feedback system guarantees direct control of position with sub-nanometer resolution of motion.

Naturally aged aluminum alloy guaranties high temperature stability, softness of 8MTL300 instruments and excellent long period kinematics without drift of guide system. Moving rotor design allows taking maximum efficiency from the ironless motor and generating rapid and smooth motion profiles. Special guiding system with caged recirculating balls ensures long last precision of stage. High width of 8MTL300 allows using system as the stable & reliable option of X stage in multi axes fabrication systems.

Translation stages of series 8MTL300 can be prepared for clean rooms and vacuum up to 10-3 torr with small changes. For higher vacuum please contact Standa. Additional requirement of cleanliness could be requested separately.

Motorized translation stage can be easily connected to standard imperial/metric optical table directly. XY scanning stages can be directly assembled without using any connecting plates. For extreme orthogonality please contact Standa separately.

Motion control of 8MT300 series translation stages is available with Standa or ACS motion Controllers & Drivers.

For light industry applications 8MTL300 stages can be supplied mounted on standard optical table or extremely flat granite plate. 8MTL300 have passive (belt protection) and active (compressed air channels) protection from spray and dusts, which allows stage to be applied in fabrication processes.

Specifications

Model 8MTL300-400-LEn1-XXX
Kinematics & Feedback information
 Travel Range, mm 400
 Encoder Type Optical
 Encoder Model LEN1
 Encoder Resolution Any of the range: 25 nm to 5 µm (on demand)
 Encoder Interface Differential RS422
 Internal Multiplier YES
 Multiplication factor 1) 4-200 (on demand)
 Encoder Grating Period, µm 20
 Reference Mark (Index) Yes
 Absolute Accuracy 2)
  Before Calibration, µm ±12
  After Calibration, µm ±1
 Uni-Directional Repeatability, µm N/A
 Bi-Directional Repeatability (peak to peak) 2), µm ±0.5
 Bi-Directional Repeatability (RMS) 2), µm ±0.26
 Pitch 3), µrad / arcsec ±30 / ±6.20
 Yaw 3), µrad / arcsec ±30 / ±6.20
 Roll, µrad / arcsec N/A
 Maximum Velocity (with load 4kg) 4), mm/s <2000
 Maximum Acceleration (with load 4kg) 5), mm/s2 <20000
 Limits Switches Type (Safety) Optical (Optrons)
 Limit Switch Polarity (Safety) Pushed is closed
 Limit Switch Voltage, V 5…24
Load, Guiding & Transmission Information
 Design Type Linear Motor Stage
 Linear Motor Model LM6
 Linear Motor Design Type Ironless BLDC motor
 Maximum Bus Voltage, VDC >320
 Load Capacity (Centrally Placed) 6)
  Horizontal, kg 150
  Vertical, kg N/A
 Moving Mass 7), kg 16
 Guiding System Recirculating linear rails and
carriage units with caged balls
Material & Environment Conditions
 Housing Material Aluminum Alloy
 Housing Coating (Finish) Black Anodizing
 Environment Pressure Normal Atmosphere
 Operating Temperature, °C 20±2
Control, Communication and Cabling
 Recommended Controllers 8) ACS Products Line or 8SMC5-USB series
 Recommended Drivers 8) ACS Products Line or 8SMC5-USB series
 Recommended Power Supply 9) 2 phase / 3 phase source
 Recommended Communication Interface 12) EtherCAT / RS232 / USB / TCP-IP
 Cable Length, m 2 (other by request)
 Differential Outputs 10) On request
Accessories Information
 Base Plate for Mechanical Interface Not required
 XY Stack Directly
 Z Configuration Not available
(choose from other Standa stages series)
Additional Details
 Dimensions of Moving Platform (W x L), mm 310 x 310
 Overall Linear Stage Dimensions (W x L x H), mm 390 x 805 x 120
 Measurement System Metric
 Orthogonality (XY Configuration) 11), µrad / arcsec 24 / 5
 Protection Level 13) From solid particles and spray
 RoHS Compliant
 Weight, kg 45

 

1) With x4 evaluation; system can be delivered with standard analog SIN/COS encoder interface for personal interpolation.

2) Absolute Accuracy & Bi-Directional Repeatability measurements are processed with Zygo ZMI 501 Michelson laser interferometer.

3) Pitch & Yaw measurements are processed with 11D-ALI-COL electronic autocollimator. Resolution of 11D-ALI-COL: 1 µrad. Environment error: 1 µrad.

4) Maximum Velocity is electrically limited by encoder and driver CUT-OF frequency; maximum velocity is also limited by guiding system.

5) Maximum Acceleration is limited by Drivers` Peak Current, Motors` Peak Current and External Load (inertia). Please contact Standa for support.

6) Load Capacity is limited by position of load and integrated guiding system. Please contact Standa support for loading calculation.

7) Moving Mass is constant parameter of system which characterize m0 or inertia of unloaded system.

8) Recommended controllers & Recommended drivers can be optimized for a certain application. Please contact Standa support for recommendation.

9) Recommended power supply depends on required duty cycle and load. Please contact Standa support for recommendation.

10) Differential Outputs are available in passive (buffered) or active (modulated) way with LCMv2.

11) Stages can be assembled with better orthogonality by request.

12) Scalar Control can be implemented with USB / TCP-IP / RS-232 communication iterface; for vector control we recommend to use EtherCAT.

13) Stages include special covers which allow their usage in dusty and partially wet environment