7T184-13 (2 pieces) stacked in XY coordinates |
7T184-13 (2 pieces) and 7VT174-10 stacked in XYZ coordinates; 7VT174 (vertical translation stage) on top |
7T184-13 (2 pieces) and 7VT174-10 stacked in XYZ coordinates; 7VT174 (vertical translation stage) at the bottom
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