1. CO2 Laser 30W, 50W, 70W

  - Wavelength : 9.3 um, 10.6um

  - Air/Water Cooling

2. XY-Stage

- Travel: 300mm

- Drive System: Linear Brushless Servomotor

- Accuracy: +/- 2.0 µm

- Resolution: 250 nm

- Maximum Load: 45.0 kg

- Repeatability: +/- 0.75 µm

- XY stack Speed: 200 mm/s

3.  Z-Stage

  - Travel: 200mm

  - Drive System: Super Precision Ground Ball Screw Brushless Servomotor

  - Accuracy: +/- 1 µm

  - Maximum Load: 25.0 kg

  - Repeatability: +/- 0.5 µm

  - Travel Speed: 50 mm/s

4. Machine vision system.

5. CAD/CAM software

6. Option : XY Galvanometer Scanner