1. Femto Second Laser
- Output wavelength (automated selection) : 1030nm, 515nm, 343nm
- pulse energy : 50 – 1000 μJ
- pulse duration : 190 ~ 300 fs
2. Air Bearing Stage
- XYZ Granite Base Stage
- Maximun Speed (XY) : 500 mm/s
- Travel XY : X 750mm, Y 500mm
- Accuracy : ±2.0um (full travel)
- Repeatbility : ±0.5um
3. Objective lens / Galvanometer Scanner
- Dual Wavelength Galvanometer : 1030nm + 515nm
- Wavelength Galvanometer : 343nm
- Mitutoyo objective lens : NIR, UV, DUV
4. Machine vision System
- Inline machine vision : zoom type 0.75 ~ 6X
5. CAD/CAM software
- Import : Autocad, inventor, dxf, dwg
- simulation fuction
- Option : 3D Slice process
6. Vaccum Chuck
7. Suction/Blower Parts
8. Option : rotary stage for stent
Applications :
Processing of sola r cells
Edge isola tion for sola r cells
Nano ripples, Metal micromachining
Marking of contact lens
Micro channel formation
Diamond cutting
Glass Holes
Stent Cutting
Marking and Pattern
Texturized Sapphire Surface